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MEMS Flow Sensor-MSH01

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Description

Category Specification Applications
Performance • Wide span ratio >300:1
• Fast response <5ms
• Ultra-low startup flow <0.05 m/s
• High accuracy (±3% reading)
• Medical: Respiratory & diagnostic equipment
• Automotive: Air flow meters
Design • No moving parts → High reliability
• Suitable for clean gases & liquids
• Energy: Fuel cell control
• Domestic: Gas equipment
Measurement Range • Gas & liquid compatible • Lab Equipment: GC/MS systems
• HVAC: Airflow monitoring
Durability • Robust construction for industrial environments • Industrial: Automation & leak detection
Parameter Description Conditions Min Typ Max Unit
Flow Range Gas measurement range 1atm, 25°C ambient 0.01 35 m/s
RA Ambient temperature sensor resistance Pins 1&5, +25°C 1440 1600 1760 Ω
RH Heater temperature resistance Pins 6&7, +25°C 90 100 110 Ω
RHT Heater temperature sensor resistance Pins 5&8, +25°C 540 600 660 Ω
RUE Upstream external temp sensor resistance Pins 3&4, +25°C 1260 1400 1540 Ω
RUI Upstream internal temp sensor resistance Pins 2&12, +25°C 1080 1200 1320 Ω
RDI Downstream internal temp sensor resistance Pins 11&12, +25°C 1080 1200 1320 Ω
RDE Downstream external temp sensor resistance Pins 9&10, +25°C 1260 1400 1540 Ω
TCR Full-bridge thin film TIP resistance temp coefficient 0°C~140°C 0.285 0.302 0.330 %/°C
RH Limit Current Heater current limit No flow, 25°C ambient, Pins 5&6 20 mA

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