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MEMS Flow Sensor-MSL01

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Description

Parameter Description Conditions Min Typ Max Unit
Flow Range Gas measurement range 1atm, 25℃ ambient 0.01 10 m/s
RA Ambient temp sensor resistance Pins 1&2, +25℃ 2700 3000 3300 Ω
RH Heater temperature resistance Pins 5&6, +25℃ 198 220 242 Ω
RUE Upstream external temp sensor resistance Pins 4&8, +25℃ 1440 1600 1760 Ω
RUI Upstream internal temp sensor resistance Pins 3&7, +25℃ 1440 1600 1760 Ω
RDI Downstream internal temp sensor resistance Pins 3&4, +25℃ 1440 1600 1760 Ω
ROE Downstream external temp sensor resistance Pins 7&8, +25℃ 1440 1600 1760 Ω
TCR Pt resistance temperature coefficient -40℃~125℃ 0.218 0.230 0.253 %/°C
RH Limit Current No flow, 25℃ ambient Pins 5&6 15 mA
Category Specification
Performance Wide span ratio >300:1
Fast response <5ms
Ultra-low startup flow <0.05 m/s
High accuracy (±3% reading)
Design No moving parts → High reliability
Suitable for clean gases & liquids
Applications Medical respiratory/diagnostic equipment
Fuel cell control
Automotive airflow meters
Domestic gas appliances
GC/MS systems
HVAC systems
Leak detection
Industrial automation

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